Conductive structure and wiring structure including the same

ABSTRACT

A conductive structure includes a core portion, a plurality of electronic devices and a filling material. The core portion defines a cavity. The electronic devices are disposed in the cavity of the core portion. The filling material is disposed between the electronic devices and a sidewall of the cavity of the core portion.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.16/399,907 filed Apr. 30, 2019, the contents of which is incorporatedherein by reference in its entirety.

BACKGROUND 1. Field of the Disclosure

The present disclosure relates to a conductive structure and wiringstructure including the same, and to a conductive structure including aplurality of electronic devices disposed in a cavity thereof, and awiring structure including the conductive structure.

2. Description of the Related Art

Along with the rapid development in electronics industry and theprogress of semiconductor processing technologies, semiconductor chipsare integrated with an increasing number of electronic components toachieve improved electrical performance and additional functions.Accordingly, the semiconductor chips are provided with more input/output(I/O) connections. To manufacture semiconductor packages includingsemiconductor chips with an increased number of I/O connections, circuitlayers of semiconductor substrates used for carrying the semiconductorchips may correspondingly increase in size. Thus, a thickness and awarpage of a semiconductor substrate may correspondingly increase, and ayield of the semiconductor substrate may decrease.

SUMMARY

In some embodiments, a conductive structure includes a core portion, aplurality of electronic devices and a filling material. The core portiondefines a cavity. The electronic devices are disposed in the cavity ofthe core portion. The filling material is disposed between theelectronic devices and a sidewall of the cavity of the core portion.

In some embodiments, a conductive structure includes a core portion, amodule and a filling material. The core portion defines a cavity. Themodule is disposed in the cavity of the core portion. The moduleincludes a plurality of known good electronic devices and an encapsulantencapsulating the known good electronic devices. The filling material isdisposed between a lateral surface of the module and a sidewall of thecavity of the core portion.

In some embodiments, a wiring structure includes an upper conductivestructure, a lower conductive structure and an intermediate layer. Theupper conductive structure includes at least one dielectric layer and atleast one circuit layer in contact with the dielectric layer. The lowerconductive structure includes a core portion, a plurality of electronicdevices and a filling material. The core portion defines a cavity. Theelectronic devices are disposed in the cavity of the core portion. Thefilling material is disposed between the electronic devices and asidewall of the cavity of the core portion. The intermediate layer isdisposed between the upper conductive structure and the lower conductivestructure and bonds the upper conductive structure and the lowerconductive structure together. The upper conductive structure iselectrically connected to the lower conductive structure.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of some embodiments of the present disclosure are readilyunderstood from the following detailed description when read with theaccompanying figures. It is noted that various structures may not bedrawn to scale, and dimensions of the various structures may bearbitrarily increased or reduced for clarity of discussion.

FIG. 1 illustrates a cross-sectional view of a wiring structureaccording to some embodiments of the present disclosure.

FIG. 2 illustrates an enlarged view of an area “A” shown in FIG. 1.

FIG. 3 illustrates a cross-sectional view of a wiring structureaccording to some embodiments of the present disclosure.

FIG. 4 illustrates a cross-sectional view of a wiring structureaccording to some embodiments of the present disclosure.

FIG. 5 illustrates a cross-sectional view of a wiring structureaccording to some embodiments of the present disclosure.

FIG. 6 illustrates a cross-sectional view of a wiring structureaccording to some embodiments of the present disclosure.

FIG. 7 illustrates a cross-sectional view of a wiring structureaccording to some embodiments of the present disclosure.

FIG. 8 illustrates a cross-sectional view of a wiring structureaccording to some embodiments of the present disclosure.

FIG. 9 illustrates a cross-sectional view of a wiring structureaccording to some embodiments of the present disclosure.

FIG. 10 illustrates an enlarged view of an area “B” shown in FIG. 9.

FIG. 11 illustrates a cross-sectional view of a wiring structureaccording to some embodiments of the present disclosure.

FIG. 12 illustrates a cross-sectional view of a wiring structureaccording to some embodiments of the present disclosure.

FIG. 13 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 14 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 15 illustrates one or more stages of an example of a method formanufacturing wiring structure according to some embodiments of thepresent disclosure.

FIG. 16 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 17 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 18 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 19 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 20 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 21 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 22 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 23 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 24 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 25 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 26 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 27 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 28 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 29 illustrates one or more stages of an example of a method formanufacturing wiring structure according to some embodiments of thepresent disclosure.

FIG. 30 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 31 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 32 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 33 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 34 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 35 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 36 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 37 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 38 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 39 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 40 illustrates one or more stages of an example of a method formanufacturing wiring structure according to some embodiments of thepresent disclosure.

FIG. 41 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 42 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 43 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 44 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 45 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 46 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 47 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 48 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 49 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 50 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 51 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 52 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 53 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 54 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 55 illustrates one or more stages of an example of a method formanufacturing wiring structure according to some embodiments of thepresent disclosure.

FIG. 56 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 57 illustrates one or more stages of an example of a method formanufacturing a wiring structure according to some embodiments of thepresent disclosure.

FIG. 58 illustrates one or more stages of an example of a method formanufacturing wiring structure according to some embodiments of thepresent disclosure.

DETAILED DESCRIPTION

Common reference numerals are used throughout the drawings and thedetailed description to indicate the same or similar components.Embodiments of the present disclosure will be readily understood fromthe following detailed description taken in conjunction with theaccompanying drawings.

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to explain certain aspects of the present disclosure. These are,of course, merely examples and are not intended to be limiting. Forexample, the formation of a first feature over or on a second feature inthe description that follows may include embodiments in which the firstand second features are formed or disposed in direct contact, and mayalso include embodiments in which additional features may be formed ordisposed between the first and second features, such that the first andsecond features may not be in direct contact. In addition, the presentdisclosure may repeat reference numerals and/or letters in the variousexamples. This repetition is for the purpose of simplicity and clarityand does not in itself dictate a relationship between the variousembodiments and/or configurations discussed.

To meet the specification of increasing I/O counts, a number ofdielectric layers of a substrate should increase. In some comparativeembodiments, a manufacturing process of a core substrate may include thefollowing stages. Firstly, a core with two copper foils disposed on twosides thereof is provided. Then, a plurality of dielectric layers and aplurality of circuit layers are formed or stacked on the two copperfoils. One circuit layer may be embedded in one corresponding dielectriclayer. Therefore, the core substrate may include a plurality of stackeddielectric layers and a plurality of circuit layers embedded in thedielectric layers on both sides of the core. Since a line width/linespace (L/S) of the circuit layers of such core substrate may be greaterthan or equal to 10 micrometers (μm)/10 μm, the number of the dielectriclayers of such core substrate is relatively large. Although themanufacturing cost of such core substrate is low, the manufacturingyield for the circuit layers and the dielectric layers of such coresubstrate is also low, and, thus, the yield of such core substrate islow. In addition, each dielectric layer is relatively thick, and, thus,such core substrate is relatively thick. In some comparativeembodiments, if a package has 10000 I/O counts, such core substrate mayinclude twelve layers of circuit layers and dielectric layers. Themanufacturing yield for one layer (including one circuit layer and onedielectric layer) of such core substrate may be 90%. Thus, the yield ofsuch core substrate may be (0.9)¹²=28.24%. In addition, warpage of thetwelve layers of circuit layers and dielectric layers may beaccumulated, and, thus, the top several layers may have severe warpage.As a result, the yield of such core substrate may be further reduced.

To address the above concerns, in some comparative embodiments, acoreless substrate is provided. The coreless substrate may include aplurality of dielectric layers and a plurality of fan-out circuitlayers. In some embodiments, a manufacturing process of a corelesssubstrate may include the following stages. Firstly, a carrier isprovided. Then, a plurality of dielectric layers and a plurality offan-out circuit layers are formed or stacked on a surface of thecarrier. One fan-out circuit layer may be embedded in one correspondingdielectric layer. Then, the carrier is removed. Therefore, the corelesssubstrate may include a plurality of stacked dielectric layers and aplurality of fan-out circuit layers embedded in the dielectric layers.Since a line width/line space (L/S) of the fan-out circuit layers ofsuch coreless substrate may be less than or equal to 2 μm/2 μm, thenumber of the dielectric layers of such coreless substrate can bereduced. Further, the manufacturing yield for the fan-out circuit layersand the dielectric layers of such coreless substrate is high. Forexample, the manufacturing yield for one layer (including one fan-outcircuit layer and one dielectric layer) of such coreless substrate maybe 99%. However, the manufacturing cost of such coreless substrate isrelatively high.

At least some embodiments of the present disclosure provide for aconductive structure including a plurality of electronic devicesreconstituted in a cavity of a core portion of the conductive structure,so as to reduce a thickness of the conductive structure, and reducepower loss. Further, at least some embodiments of the present disclosureprovide for a wiring structure which has an advantageous compromise ofyield and manufacturing cost. In some embodiments, the wiring structureincludes an upper conductive structure and a lower conductive structurebonded to the upper conductive structure through an intermediate layer.At least some embodiments of the present disclosure further provide fortechniques for manufacturing the conductive structure and the wiringstructure.

FIG. 1 illustrates a cross-sectional view of a wiring structure 1according to some embodiments of the present disclosure. The wiringstructure 1 includes an upper conductive structure 2, a lower conductivestructure 3, an intermediate layer 12 and at least one upper through via14.

The upper conductive structure 2 includes at least one dielectric layer(including, for example, two first dielectric layers 20 and a seconddielectric layer 26) and at least one circuit layer (including, forexample, a topmost circuit layer 24′, three first circuit layers 24 anda second circuit layer 28 formed of a metal, a metal alloy, or otherconductive material) in contact with the dielectric layer (e.g., thefirst dielectric layers 20 and the second dielectric layer 26). In someembodiments, the upper conductive structure 2 may be similar to acoreless substrate, and may be in a wafer type, a panel type or a striptype. The upper conductive structure 2 may be also referred to as “astacked structure” or “a high-density conductive structure” or “ahigh-density stacked structure”. The circuit layer (including, forexample, the topmost circuit layer 24′ and the three circuit layers 24)of the upper conductive structure 2 may be also referred to as “ahigh-density circuit layer”. In some embodiments, a density of a circuitline (including, for example, a trace or a pad) of the high-densitycircuit layer is greater than a density of a circuit line of alow-density circuit layer. That is, the count of the circuit line(including, for example, a trace or a pad) in a unit area of thehigh-density circuit layer is greater than the count of the circuit linein an equal unit area of the low-density circuit layer, such as about1.2 times or greater, about 1.5 times or greater, or about 2 times orgreater. Alternatively, or in combination, a line width/line space (L/S)of the high-density circuit layer is less than a L/S of the low-densitycircuit layer, such as about 90% or less, about 50% or less, or about20% or less. Further, the conductive structure that includes thehigh-density circuit layer may be designated as the “high-densityconductive structure”, and the conductive structure that includes thelow-density circuit layer may be designated as a “low-density conductivestructure”.

The upper conductive structure 2 has a top surface 21 and a bottomsurface 22 opposite to the top surface 21, and defines at least onethrough hole 23, each of which is a single, continuous through hole. Theupper conductive structure 2 includes a plurality of dielectric layers(e.g., the two first dielectric layers 20 and the second dielectriclayer 26), a plurality of circuit layers (e.g., the topmost circuitlayer 24′, the three first circuit layers 24 and the second circuitlayer 28) and at least one inner via 25. The dielectric layers (e.g.,the first dielectric layers 20 and the second dielectric layer 26) arestacked on one another. For example, the second dielectric layer 26 isdisposed on the first dielectric layers 20, and, thus, the seconddielectric layer 26 is the topmost dielectric layer. In someembodiments, a material of the dielectric layers (e.g., the firstdielectric layers 20 and the second dielectric layer 26) is transparent,and can be seen through by human eyes or machine. That is, a markdisposed adjacent to the bottom surface 22 of the upper conductivestructure 2 can be recognized or detected from the top surface 21 of theupper conductive structure 2 by human eyes or machine. In someembodiments, a transparent material of the dielectric layers has a lighttransmission for a wavelength in the visible range (or other pertinentwavelength for detection of a mark) of at least about 60%, at leastabout 70%, or at least about 80%.

In addition, each of the first dielectric layers 20 has a top surface201 and a bottom surface 202 opposite to the top surface 201, anddefines a through hole 203 having an inner surface 2031. The seconddielectric layer 26 has a top surface 261 and a bottom surface 262opposite to the top surface 261, and defines a through hole 263 havingan inner surface 2631. The bottom surface 262 of the second dielectriclayer 26 is disposed on and contacts the top surface 201 of the adjacentfirst dielectric layer 20. Thus, the top surface 21 of the upperconductive structure 2 is the top surface 261 of the second dielectriclayer 26, and the bottom surface 22 of the upper conductive structure 2is the bottom surface 202 of the bottommost first dielectric layer 20.

As shown in FIG. 1, each of the through holes 203 of the firstdielectric layers 20 tapers downwardly along a direction from the topsurface 21 towards the bottom surface 22 of the upper conductivestructure 2; that is, a size of a top portion of the through hole 203 isgreater than a size of a bottom portion of the through hole 203. Thethrough hole 263 of the second dielectric layer 26 also tapersdownwardly; that is, a size of a top portion of the through hole 263 isgreater than a size of a bottom portion of the through hole 263.Further, the through hole 263 of the second dielectric layer 26 isaligned with and in communication with the through holes 203 of thefirst dielectric layers 20. The bottom portion of the through hole 263of the second dielectric layer 26 is disposed adjacent to or connectedto the top portion of the through hole 203 of the first dielectric layer20 under the second dielectric layer 26. The size of the bottom portionof the through hole 263 of the second dielectric layer 26 issubstantially equal to the size of the top portion of the through hole203 of the first dielectric layer 20 under the second dielectric layer26. Thus, the inner surface 2631 of the through hole 263 of the seconddielectric layer 26 is coplanar with or aligned with the inner surfaces2031 of the through holes 203 of the first dielectric layers 20. It isnoted that the above-mentioned “coplanar” surfaces need not be flat. Insome embodiments, the inner surface 2631 of the through hole 263 of thesecond dielectric layer 26 and the inner surfaces 2031 of the throughholes 203 of the first dielectric layers 20 may be curved surfaces, andare portions of an inner surface 231 of the single, continuous throughhole 23 for accommodating the upper through via 14. The through hole 263of the second dielectric layer 26 and the through holes 203 of the firstdielectric layers 20 are collectively configured to form or define aportion of the single through hole 23. As shown in FIG. 1,cross-sectional views of one side of the inner surface 2631 of thethrough hole 263 of the second dielectric layer 26 and the innersurfaces 2031 of the through holes 203 of the first dielectric layers 20are segments of a substantially straight line. That is, cross-sectionalviews of one side of the inner surface 2631 of the through hole 263 ofthe second dielectric layer 26 and the inner surfaces 2031 of thethrough holes 203 of the first dielectric layers 20 may extend along thesame substantially straight line. The single through hole 23 extendsthrough the upper conductive structure 2; that is, the single throughhole 23 extends from the top surface 21 of the upper conductivestructure 2 to the bottom surface 22 of the upper conductive structure2. The single through hole 23 tapers downwardly.

The first circuit layers 24 may be fan-out circuit layers orredistribution layers (RDLs), and an L/S of the first circuit layers 24may be less than or equal to about 2 μm/about 2 μm, or less than orequal to about 1.8 μm/about 1.8 μm. Each of the first circuit layers 24has a top surface 241 and a bottom surface 242 opposite to the topsurface 241. In some embodiments, the first circuit layer 24 is embeddedin the corresponding first dielectric layer 20, and the top surface 241of the first circuit layer 24 may be substantially coplanar with the topsurface 201 of the first dielectric layer 20. In some embodiments, eachfirst circuit layer 24 may include a seed layer 243 and a conductivemetallic material 244 disposed on the seed layer 243. As shown in FIG.1, the bottommost first circuit layer 24 is disposed on and protrudesfrom the bottom surface 22 of the upper conductive structure 2 (e.g.,the bottom surface 202 of the bottommost first dielectric layer 20).Further, the topmost circuit layer 24′ may omit a seed layer, and may beelectrically connected to the below circuit layer 24 through the innervias 25. A top surface of the topmost circuit layer 24′ may besubstantially coplanar with the top surface 21 of the upper conductivestructure 2 (e.g., the top surface 261 of the second dielectric layer26). Thus, the top surface of the topmost circuit layer 24′ may beexposed from the top surface 21 of the upper conductive structure 2(e.g., the top surface 261 of the second dielectric layer 26). However,in some embodiments, the topmost circuit layer 24′ may be omitted; thus,a horizontally connecting or extending circuit layer may be omitted inthe second dielectric layer 26. In addition, the second circuit layer 28is disposed on and protrudes from the top surface 21 of the upperconductive structure 2 (e.g., the top surface 261 of the seconddielectric layer 26). An L/S of the second circuit layer 28 may begreater than or equal to the L/S of the first circuit layer 24.

The upper conductive structure 2 includes a plurality of inner vias 25.Some of the inner vias 25 are disposed between two adjacent firstcircuit layers 24 for electrically connecting the two first circuitlayers 24. Some of the inner vias 25 are disposed between the firstcircuit layer 24 and the top circuit layer 24′ for electricallyconnecting the first circuit layer 24 and the top circuit layer 24′.Some of the inner vias 25 are disposed between the first circuit layer24 and the second circuit layer 28 for electrically connecting the firstcircuit layer 24 and the second circuit layer 28. In some embodiments,each inner via 25 may include a seed layer 251 and a conductive metallicmaterial 252 disposed on the seed layer 251. In some embodiments, eachinner via 25 and the corresponding first circuit layer 24 may be formedintegrally as a monolithic or one-piece structure. Each inner via 25tapers upwardly along a direction from the bottom surface 22 towards thetop surface 21 of the upper conductive structure 2. That is, a size(e.g., a width) of a top portion of the inner via 25 is less than a size(e.g., a width) of a bottom portion of the inner via 25 that is closertowards the bottom surface 22. In some embodiments, a maximum width ofthe inner via 25 (e.g., at the bottom portion) may be less than or equalto about 25 μm, such as about 25 μm, about 20 μm about 15 μm or about 10μm.

The lower conductive structure 3 includes at least one dielectric layer(including, for example, one first upper dielectric layer 30, one firstlower dielectric layer 30 a and two second lower dielectric layers 36 a)and at least one circuit layer (including, for example, one first uppercircuit layer 34, one second upper circuit layers 38, one first lowercircuit layer 34 a and three second lower circuit layers 38 a, 38 a′formed of a metal, a metal alloy, or other conductive material) incontact with the dielectric layer (e.g., the first upper dielectriclayer 30, the first lower dielectric layer 30 a and the second lowerdielectric layer 36 a), and a plurality of electronic devices 40. Insome embodiments, the lower conductive structure 3 may be similar to acore substrate that further includes a core portion 37, and may be in awafer type, a panel type or a strip type. The lower conductive structure3 may be also referred to as “a stacked structure” or “a low-densityconductive structure” or “a low-density stacked structure”. The circuitlayer (including, for example, the first upper circuit layer 34, thesecond upper circuit layers 38, the first lower circuit layer 34 a andthe three second lower circuit layers 38 a, 38 a′) of the lowerconductive structure 3 may be also referred to as “a low-density circuitlayer”. As shown in FIG. 1, the lower conductive structure 3 has a topsurface 31 and a bottom surface 32 opposite to the top surface 31. Thelower conductive structure 3 includes a plurality of dielectric layers(for example, the first upper dielectric layer 30, the first lowerdielectric layer 30 a and the second lower dielectric layer 36 a), aplurality of circuit layers (for example, the first upper circuit layer34, the second upper circuit layer 38, the first lower circuit layer 34a and the three second lower circuit layers 38 a, 38 a′) and at leastone inner via (including, for example, a plurality of upperinterconnection vias 35 and a plurality of lower interconnection vias 35a).

The core portion 37 has a top surface 371 and a bottom surface 372opposite to the top surface 371, and defines a plurality of throughholes 373 and a cavity 375 extending through the core portion 37. Thecore portion 37 may include a first core material layer 37 a, a secondcore material layer 37 b, a third core material layer 37 c and two innercircuit layers 376. The first core material layer 37 a, the second corematerial layer 37 b and the third core material layer 37 c are stackedon one another, and the inner circuit layers 376 are disposed betweenthe first core material layer 37 a and the second core material layer 37b, and between the first core material layer 37 a and the third corematerial layer 37 c. The cavity 375 may extend through the first corematerial layer 37 a, the second core material layer 37 b and the thirdcore material layer 37 c.

An interconnection via 39 is disposed or formed in each through hole 373for vertical connection. The interconnection vias 39 may surround thecavity 375 and extend through the core portion 37. In some embodiments,each interconnection via 39 includes a base metallic layer 391 and aninsulation material 392. The base metallic layer 391 is disposed orformed on a side wall of the through hole 373, and defines a centralthrough hole. The insulation material 392 fills the central through holedefined by the base metallic layer 391. In some embodiments, theinterconnection via 39 may omit an insulation material, and may includea bulk metallic material that fills the through hole 373.

The electronic devices 40 are disposed in the cavity 375 of the coreportion 37. In some embodiments, the electronic devices 40 may bepassive components, such as capacitors. The sizes and functions of theelectronic devices 40 may be same as or different from each other. Eachof the electronic devices 40 has a top surface 401, a bottom surface 402opposite to the top surface 401 and a lateral surface 403 extendingbetween the top surface 401 and the bottom surface 402. Each of theelectronic devices 40 includes at least one electrical contact (e.g., aplurality of top electrical contacts 404 disposed adjacent to the topsurface 401, and a plurality of bottom electrical contacts 405 disposedadjacent to the bottom surface 402). For example, each of the topelectrical contacts 404 and the bottom electrical contacts 405 may be anelectrode. In some embodiments, the electronic devices 40 may bedisposed side by side, and the number of the electronic devices 40 maybe greater than ten, greater than twenty, greater than forty, or greaterthan sixty. In some embodiments, the electronic devices 40 are knowngood electronic devices 40 that are reconstituted or rearranged in thecavity 375 of the core portion 37. As shown in FIG. 1, the bottomsurfaces 402 of the electronic devices 40 may be substantially coplanarwith the bottom surface 372 of the core portion 37, and the top surfaces401 of the electronic devices 40 may be substantially coplanar with thetop surface 371 of the core portion 37.

The filling material 42 is disposed between the electronic devices 40and a sidewall 3751 of the cavity 375 of the core portion 37. As shownin FIG. 1, the filling material 42 is disposed between the lateralsurfaces 403 of adjacent two electronic devices 40, and between thelateral surface 403 the electronic device 40 and the sidewall 3751 ofthe cavity 375 of the core portion 37. The filling material 42 has a topsurface 421 and a bottom surface 422 opposite to the top surface 421. Aportion of the filling material 42 may extend to the top surfaces 401 ofthe electronic devices 40. That is, the top surface 421 of the fillingmaterial 42 may be higher than the top surfaces 401 of the electronicdevices 40. However, the filling material 42 does not completely coverthe electrical contact (e.g., the top electrical contacts 404 and thebottom electrical contacts 405). Thus, the electrical contact (e.g., thetop electrical contacts 404 and the bottom electrical contacts 405) maybe exposed from the filling material 42. As shown in FIG. 1, the bottomsurface 422 of the filling material 42 may be substantially coplanarwith the bottom surfaces 402 of the electronic devices 40. In someembodiments, a material of the filling material 42 may be resin, ink(e.g. Ajinomoto build-up film (ABF) ink), or molding compound. Thefilling material 42 may have no fillers. Alternatively, the fillingmaterial 42 may have fillers with a size of 1˜2 μm or less. In addition,a film loss of the filling material 42 may be less than 0.4% so as toresist the chemical etching.

The first upper dielectric layer 30 is disposed on the top surface 371of the core portion 37, and has a top surface 301 and a bottom surface302 opposite to the top surface 301. Thus, the bottom surface 302 of thefirst upper dielectric layer 30 contacts the top surface 371 of the coreportion 37. In addition, the first lower dielectric layer 30 a isdisposed on the bottom surface 372 of the core portion 37, and has a topsurface 301 a and a bottom surface 302 a opposite to the top surface 301a. Thus, the top surface 301 a of the first lower dielectric layer 30 acontacts the bottom surface 372 of the core portion 37. The two secondlower dielectric layers 36 a are stacked or disposed on the first lowerdielectric layer 30 a, and each has a top surface 361 a and a bottomsurface 362 a opposite to the top surface 361 a. Thus, the top surface361 a of the top second lower dielectric layer 36 a contacts the bottomsurface 302 a of the first lower dielectric layer 30 a, and the bottomsecond lower dielectric layer 36 a is the bottommost dielectric layer.As shown in FIG. 1, the top surface 31 of the lower conductive structure3 is the top surface 301 of the first upper dielectric layer 30, and thebottom surface 32 of the lower conductive structure 3 is the bottomsurface of the bottom second lower dielectric layer 36 a.

A thickness of each of the dielectric layers (e.g., the first dielectriclayers 20 and the second dielectric layer 26) of the upper conductivestructure 2 is less than or equal to about 40%, less than or equal toabout 35%, less than or equal to about 30% of a thickness of each of thedielectric layers (e.g., the first upper dielectric layer 30, the firstlower dielectric layer 30 a and the two second lower dielectric layers36 a) of the lower conductive structure 3. For example, a thickness ofeach of the dielectric layers (e.g., the first dielectric layers 20 andthe second dielectric layer 26) of the upper conductive structure 2 maybe less than or equal to about 7 μm, and a thickness of each of thedielectric layers (e.g., the first upper dielectric layer 30, the firstlower dielectric layer 30 a and the two second lower dielectric layers36 a) of the lower conductive structure 3 may be about 40 μm.

An L/S of the first upper circuit layer 34 may be greater than or equalto about 10 μm/about 10 μm. Thus, the L/S of the first upper circuitlayer 34 may be greater than or equal to about five times the L/S of thefirst circuit layers 24 of the upper conductive structure 2. The firstupper circuit layer 34 has a top surface and a bottom surface oppositeto the top surface. In some embodiments, the first upper circuit layer34 is formed or disposed on the top surface 371 of the core portion 37,and covered by the first upper dielectric layer 30. The bottom surfaceof the first upper circuit layer 34 contacts the top surface 371 of thecore portion 37. In some embodiments, the first upper circuit layer 34may include a first metallic layer 343, a second metallic layer 344 anda third metallic layer 345. The first metallic layer 343 is disposed onthe top surface 371 of the core portion 37, and may be formed from acopper foil (e.g., may constitute a portion of the copper foil). Thesecond metallic layer 344 is disposed on the first metallic layer 343,and may be a plated copper layer. The third metallic layer 345 isdisposed on the second metallic layer 344, and may be another platedcopper layer. In some embodiments, the third metallic layer 345 may beomitted.

An L/S of the second upper circuit layer 38 may be greater than or equalto about 10 μm/about 10 μm. Thus, the L/S of the second upper circuitlayer 38 may be substantially equal to the L/S of the first uppercircuit layer 34, and may be greater than or equal to about five timesthe L/S of the first circuit layers 24 of the upper conductive structure2. The second upper circuit layer 38 has a top surface and a bottomsurface opposite to the top surface. In some embodiments, the secondupper circuit layer 38 is disposed on and protrudes from the top surface301 of the first upper dielectric layer 30. The bottom surface of thesecond upper circuit layer 38 contacts the top surface 301 of the firstupper dielectric layer 30. In some embodiments, the second upper circuitlayer 38 is electrically connected to the first upper circuit layer 34through the upper interconnection vias 35. That is, the upperinterconnection vias 35 are disposed between the second upper circuitlayer 38 and the first upper circuit layer 34 for electricallyconnecting the second upper circuit layer 38 and the first upper circuitlayer 34. Further, the second upper circuit layer 38 is electricallyconnected to the top electrical contacts 404 of the electronic devices40 through the upper interconnection vias 35. In some embodiments, thesecond upper circuit layer 38 and the upper interconnection vias 35 areformed integrally as a monolithic or one-piece structure. Each upperinterconnection via 35 tapers downwardly along a direction from the topsurface 31 towards the bottom surface 32 of the lower conductivestructure 3.

An L/S of the first lower circuit layer 34 a may be greater than orequal to about 10 μm/about 10 μm. Thus, the L/S of the first lowercircuit layer 34 a may be greater than or equal to about five times theL/S of the first circuit layers 24 of the upper conductive structure 2.The first lower circuit layer 34 a has a top surface and a bottomsurface opposite to the top surface. In some embodiments, the firstlower circuit layer 34 a is formed or disposed on the bottom surface 372of the core portion 37, and covered by the first lower dielectric layer30 a. The top surface of the first lower circuit layer 34 a contacts thebottom surface 372 of the core portion 37. In some embodiments, thefirst lower circuit layer 34 a may include a first metallic layer 343 a,a second metallic layer 344 a and a third metallic layer 345 a. Thefirst metallic layer 343 a is disposed on the bottom surface 372 of thecore portion 37, and may be formed from a copper foil. The secondmetallic layer 344 a is disposed on the first metallic layer 343 a, andmay be a plated copper layer. The third metallic layer 345 a is disposedon the second metallic layer 344 a, and may be another plated copperlayer. In some embodiments, the third metallic layer 345 a may beomitted.

An L/S of the second lower circuit layer 38 a may be greater than orequal to about 10 μm/about 10 μm. Thus, the L/S of the second lowercircuit layer 38 a may be substantially equal to the L/S of the firstupper circuit layer 34, and may be greater than or equal to about fivetimes the L/S of the first circuit layers 24 of the upper conductivestructure 2. The second lower circuit layer 38 a has a top surface and abottom surface opposite to the top surface. In some embodiments, thesecond lower circuit layer 38 a is formed or disposed on the bottomsurface 302 a of the first lower dielectric layer 30 a, and covered bythe second lower dielectric layer 36 a. The top surface of the secondlower circuit layer 38 a contacts the bottom surface 302 a of the firstlower dielectric layer 30 a. In some embodiments, the second lowercircuit layer 38 a is electrically connected to the first lower circuitlayer 34 a through the lower interconnection vias 35 a. That is, thelower interconnection vias 35 a are disposed between the second lowercircuit layer 38 a and the first lower circuit layer 34 a forelectrically connecting the second lower circuit layer 38 a and thefirst lower circuit layer 34 a. Further, the second lower circuit layer38 a is electrically connected to the bottom electrical contacts 405 ofthe electronic devices 40 through the lower interconnection vias 35 a.In some embodiments, the second lower circuit layer 38 a and the lowerinterconnection vias 35 a are formed integrally as a monolithic orone-piece structure. The lower interconnection vias 35 a tapers upwardlyalong a direction from the bottom surface 32 towards the top surface 31of the lower conductive structure 3.

In addition, in some embodiments, the top second lower circuit layer 38a′ is formed or disposed on the bottom surface 362 a of the top secondlower dielectric layer 36 a, and the bottom second lower circuit layer38 a′ is formed or disposed on the bottom surface of the bottom secondlower dielectric layer 36 a. In some embodiments, the two second lowercircuit layers 38 a′ are electrically connected to the second lowercircuit layer 38 a through the lower interconnection vias 35 a. In someembodiments, each interconnection via 39 electrically connects the firstupper circuit layer 34 and the first lower circuit layer 34 a. The basemetallic layer 391 of the interconnection via 39, the second metalliclayer 344 of the first upper circuit layer 34 and the second metalliclayer 344 a the first lower circuit layer 34 a may be formed integrallyand concurrently as a monolithic or one-piece structure.

The intermediate layer 12 is interposed or disposed between the upperconductive structure 2 and the lower conductive structure 3 to bond theupper conductive structure 2 and the lower conductive structure 3together. That is, the intermediate layer 12 adheres to the bottomsurface 22 of the upper conductive structure 2 and the top surface 31 ofthe lower conductive structure 3. In some embodiments, the intermediatelayer 12 may be an adhesion layer that is cured from an adhesivematerial (e.g., includes a cured adhesive material such as an adhesivepolymetric material). The intermediate layer 12 has a top surface 121and a bottom surface 122 opposite to the top surface 121, and defines atleast one through hole 123 having an inner surface 1231. The top surface121 of the intermediate layer 12 contacts the bottom surface 22 of theupper conductive structure 2 (that is, the bottom surface 22 of theupper conductive structure 2 is attached to the top surface 121 of theintermediate layer 12), and the bottom surface 122 of the intermediatelayer 12 contacts the top surface 31 of the lower conductive structure3. Thus, the bottommost first circuit layer 24 of the upper conductivestructure 2 and the topmost circuit layer 38 (e.g., the second uppercircuit layer 38) of the lower conductive structure 3 are embedded inthe intermediate layer 12. In some embodiments, a bonding force betweentwo adjacent dielectric layers (e.g., two adjacent first dielectriclayers 20) of the upper conductive structure 2 is greater than a bondingforce between a dielectric layer (e.g., the bottommost first dielectriclayers 20) of the upper conductive structure 2 and the intermediatelayer 12. A surface roughness of a boundary between two adjacentdielectric layers (e.g., two adjacent first dielectric layers 20) of theupper conductive structure 2 is greater than a surface roughness of aboundary between a dielectric layer (e.g., the bottommost firstdielectric layers 20) of the upper conductive structure 2 and theintermediate layer 12, such as about 1.1 times or greater, about 1.3times or greater, or about 1.5 times or greater in terms of root meansquared surface roughness.

In some embodiments, a material of the intermediate layer 12 istransparent, and can be seen through by human eyes or machine. That is,a mark disposed adjacent to the top surface 31 of the lower conductivestructure 3 can be recognized or detected from the top surface 21 of theupper conductive structure 2 by human eyes or machine. In someembodiments, a material of the intermediate layer 12 may includeAjinomoto build-up film (ABF).

The through hole 123 extends through the intermediate layer 12. In someembodiments, the through hole 123 of the intermediate layer 12 mayextend through the bottommost first circuit layer 24 of the upperconductive structure 2 and terminate at or on a topmost circuit layer(e.g., the second upper circuit layer 38′) of the lower conductivestructure 3. That is, the through hole 123 of the intermediate layer 12does not extend through the topmost circuit layer (e.g., the secondupper circuit layer 38′) of the lower conductive structure 3. Thethrough hole 123 of the intermediate layer 12 may expose a portion ofthe topmost circuit layer (e.g., the top surface of the second uppercircuit layer 38) of the lower conductive structure 3.

As shown in FIG. 1, the through hole 123 of the intermediate layer 12tapers downwardly along a direction from the top surface 121 towards thebottom surface 122 of the intermediate layer 12; that is, a size of atop portion of the through hole 123 is greater than a size of a bottomportion of the through hole 123. Further, the through hole 123 of theintermediate layer 12 is aligned with and in communication with thethrough holes 203 of the first dielectric layers 20 and the through hole263 of the second dielectric layer 26. The bottom portion of the throughhole 203 of the bottommost first dielectric layer 20 is disposedadjacent to or connected to the top portion of the through hole 123 ofthe intermediate layer 12. The size of the bottom portion of the throughhole 203 of the bottommost first dielectric layer 20 is substantiallyequal to the size of the top portion of the through hole 123 of theintermediate layer 12. Thus, the inner surface 1231 of the through hole123 of the intermediate layer 12 is coplanar or aligned with the innersurfaces 2031 of the through holes 203 of the first dielectric layers 20and the inner surface 2631 of the through hole 263 of the seconddielectric layer 26. In some embodiments, inner surface 1231 of thethrough hole 123 of the intermediate layer 12 may be a curved surface,and is a portion of an inner surface 231 of the single, continuousthrough hole 23 for accommodating the upper through via 14. The throughhole 123 of the intermediate layer 12, the through hole 203 of the firstdielectric layer 20 and the through hole 263 of the second dielectriclayer 26 are collectively configured to form or define the singlethrough hole 23. Thus, the single through hole 23 includes the throughhole 123 of the intermediate layer 12, the through hole 203 of the firstdielectric layer 20 and the through hole 263 of the second dielectriclayer 26.

As shown in FIG. 1, cross-sectional views of one side of the throughhole 123 of the intermediate layer 12, the inner surfaces 2031 of thethrough holes 203 of the first dielectric layers 20 and the innersurface 2631 of the through hole 263 of the second dielectric layer 26are segments of a substantially straight line. That is, cross-sectionalviews of one side of the inner surface 1231 of the through hole 123 ofthe intermediate layer 12, the inner surfaces 2031 of the through holes203 of the first dielectric layers 20 and the inner surface 2631 of thethrough hole 263 of the second dielectric layer 26 may extend along thesame substantially straight line. The single through hole 23 extendsthrough the upper conductive structure 2 and the intermediate layer 12;that is, the single through hole 23 extends from the top surface 21 ofthe upper conductive structure 2 to the bottom portion of theintermediate layer 12 to expose a portion of the topmost circuit layer(e.g., the top surface of the second upper circuit layer 38) of thelower conductive structure 3. The single through hole 23 tapersdownwardly. A maximum width (e.g., at the top portion) of the singlethrough hole 23 may be about 25 μm to about 60 μm.

The upper through via 14 is formed or disposed in the correspondingsingle through hole 23, and is formed of a metal, a metal alloy, orother conductive material. Thus, the upper through via 14 extendsthrough at least a portion of the upper conductive structure 2 and theintermediate layer 12, and is electrically connected to the topmostcircuit layer (e.g., the top surface of the second upper circuit layer38) of the lower conductive structure 3. As shown in FIG. 1, the upperthrough via 14 extends through and contacts the bottommost first circuitlayer 24 of the upper conductive structure 2, and terminates at or on,and contacts a portion of the topmost circuit layer (e.g., the topsurface of the second upper circuit layer 38) of the lower conductivestructure 3. The upper through via 14 extends from the top surface 21 ofthe upper conductive structure 2 to the bottom surface 122 of theintermediate layer 12. Thus, the upper through via 14 extends to contacta portion of the lower conductive structure 3, and the upper through via14 does not extend through the lower conductive structure 3. In someembodiments, a low-density circuit layer (e.g., the second upper circuitlayer 38) of the low-density conductive structure (e.g., the lowerconductive structure 3) is electrically connected to a high-densitycircuit layer (e.g., the bottommost first circuit layer 24) of thehigh-density conductive structure (e.g., the upper conductive structure2) solely by the upper through via 14 extending through the high-densitycircuit layer (e.g., the bottommost first circuit layer 24) of thehigh-density conductive structure (e.g., the upper conductive structure2). A length (along a longitudinal axis) of the upper through via 14 isgreater than a thickness of the high-density conductive structure (e.g.,the upper conductive structure 2). Further, the upper through via 14tapers downwardly; that is, a size of a top portion of the upper throughvia 14 is greater than a size of a bottom portion of the upper throughvia 14. Thus, a tapering direction of the inner via 25 of the upperconductive structure 2 is different from a tapering direction of theupper through via 14. In some embodiments, the upper through via 14 is amonolithic structure or a one-piece structure having a homogeneousmaterial composition, and a peripheral surface of the upper through via14 is a substantially continuous surface without boundaries. The upperthrough via 14 and the second circuit layer 28 may be formed integrallyas a monolithic or one-piece structure. In some embodiments, a maximumwidth of the upper through via 14 may be less than about 40 μm, such asabout 30 μm or about 20 μm.

FIG. 2 illustrates an enlarged view of an area “A” shown in FIG. 1. Athickness of the electronic device 40 or a depth of the cavity 375 ofthe core portion 37 is defined as “T₁”, and a gap between the lateralsurface 403 of the electronic device 40 and the sidewall 3751 of thecavity 375 of the core portion 37 is defined as “g₂”. A ratio of thethickness T₁ to the gap g₂ is greater than 10:1, greater than 100:1,greater than 250:1, or greater than 500:1. In some embodiments, thethickness of the electronic device 40 or a depth of the cavity 375 ofthe core portion 37 (e.g., the “T₁”) may be about 500 μm, and the gapbetween the lateral surface 403 of the electronic device 40 and thesidewall 3751 of the cavity 375 of the core portion 37 (e.g., the “g₂”)may be about 1˜2 μm. In addition, a gap between the lateral surfaces 403of the adjacent electronic devices 40 is defined as “g₁”. A ratio of thethickness T₁ to the gap g₁ is greater than 10:1, greater than 100:1,greater than 250:1, or greater than 500:1. The gap between the lateralsurfaces 403 of the electronic devices 40 may be about 1˜2 μm.

As shown in the embodiment illustrated in FIG. 1 and FIG. 2, the wiringstructure 1 is a combination of the upper conductive structure 2 and thelower conductive structure 3, in which the first circuit layer 24 of theupper conductive structure 2 has fine pitch, high yield and lowthickness; and the circuit layers (e.g., the first upper circuit layer34, the second upper circuit layers 38, the first lower circuit layer 34a and the second lower circuit layers 38 a, 38 a′) of the lowerconductive structure 3 have low manufacturing cost. Thus, the wiringstructure 1 has an advantageous compromise of yield and manufacturingcost, and the wiring structure 1 has a relatively low thickness. In someembodiments, if a package has 10000 I/O counts, the wiring structure 1includes three layers of the first circuit layers 24 of the upperconductive structure 2 and six layers of the circuit layers (e.g., thefirst upper circuit layer 34, the second upper circuit layers 38, thefirst lower circuit layer 34 a and the three second lower circuit layers38 a, 38 a′) of the lower conductive structure 3. The manufacturingyield for one layer of the first circuit layers 24 of the upperconductive structure 2 may be 99%, and the manufacturing yield for onelayer of the circuit layers (e.g., the first upper circuit layer 34, thesecond upper circuit layers 38, the first lower circuit layer 34 a andthe three second lower circuit layers 38 a, 38 a′) of the lowerconductive structure 3 may be 90%. Thus, the yield of the wiringstructure 1 may be improved. In addition, the warpage of the upperconductive structure 2 and the warpage of the lower conductive structure3 are separated and will not influence each other. In some embodiments,a warpage shape of the upper conductive structure 2 may be differentfrom a warpage shape of the lower conductive structure 3. For example,the warpage shape of the upper conductive structure 2 may be a convexshape, and the warpage shape of the lower conductive structure 3 may bea concave shape. In some embodiments, the warpage shape of the upperconductive structure 2 may be the same as the warpage shape of the lowerconductive structure 3; however, the warpage of the lower conductivestructure 3 will not be accumulated onto the warpage of the upperconductive structure 2. Thus, the yield of the wiring structure 1 may befurther improved.

In addition, during a manufacturing process, the lower conductivestructure 3 and the upper conductive structure 2 may be testedindividually before being bonded together. Therefore, known good lowerconductive structure 3 and known good upper conductive structure 2 maybe selectively bonded together. Bad (or unqualified) lower conductivestructure 3 and bad (or unqualified) upper conductive structure 2 may bediscarded. As a result, the yield of the wiring structure 1 may befurther improved.

In addition, the electronic devices 40 are embedded in the cavity 375;thus, the power loss can be reduced. Further, the upper through via 14can be used as an electrical connection path and a heat dissipatingpath.

FIG. 3 illustrates a cross-sectional view of a wiring structure 1 aaccording to some embodiments of the present disclosure. The wiringstructure 1 a is similar to the wiring structure 1 shown in FIG. 1,except for structures of an upper conductive structure 2 a and a lowerconductive structure 3 a. As shown in FIG. 3, the upper conductivestructure 2 a and the lower conductive structure 3 a are both stripstructures. Thus, the wiring structure 1 a is a strip structure. In someembodiments, the lower conductive structure 3 a may be a panel structurethat carries a plurality of strip upper conductive structures 2 a. Thus,the wiring structure 1 a is a panel structure. A length (e.g., about 240mm) of the upper conductive structure 2 a is greater than a width (e.g.,about 95 mm) of the upper conductive structure 2 a from a top view.Further, a length of the lower conductive structure 3 a is greater thana width of the lower conductive structure 3 a from a top view. Inaddition, a lateral peripheral surface 27 of the upper conductivestructure 2 a is not coplanar with (e.g., is inwardly recessed from orotherwise displaced from) a lateral peripheral surface 33 of the lowerconductive structure 3 a. In some embodiments, during a manufacturingprocess, the lower conductive structure 3 a and the upper conductivestructure 2 a may be both known good strip structures. Alternatively,the upper conductive structure 2 a may be a known good strip structure,and the lower conductive structure 3 a may be a known good panelstructure. As a result, the yield of the wiring structure 1 a may befurther improved.

FIG. 4 illustrates a cross-sectional view of a wiring structure 1 baccording to some embodiments of the present disclosure. The wiringstructure 1 b is similar to the wiring structure 1 a shown in FIG. 3,except for a structure of a lower conductive structure 3 b. In the lowerconductive structure 3 b, the second upper circuit layer 38 is omitted.Further, the first upper dielectric layer 30 (FIG. 3) is thinned tobecome a first upper dielectric layer 30′. Thus, the top surface 31 ofthe lower conductive structure 3 b is the top surface of the first upperdielectric layer 30′, which is substantially flat.

In addition, the upper through vias 14 contact respective ones of thetop electrical contacts 404 of the electronic devices 40. That is, eachof the upper through vias 14 terminates at or on each of the topelectrical contacts 404 of the electronic devices 40. As shown in FIG.4, the wiring structure 1 b further includes a plurality of through vias16 extending through the upper conductive structure 2 a and the coreportion 37 of the lower conductive structure 3 b. The through via 16terminates at or on, and contacts the first lower circuit layer 34 a ofthe lower conductive structure 3 b.

FIG. 5 illustrates a cross-sectional view of a wiring structure 1 caccording to some embodiments of the present disclosure. The wiringstructure 1 c is similar to the wiring structure 1 b shown in FIG. 4,except for a structure of a lower conductive structure 3 c. In the lowerconductive structure 3 c, the first upper dielectric layer 30′ isomitted. Thus, the top surface 31 of the lower conductive structure 3 cis the top surface 371 of the core portion 37. As shown in FIG. 5, thebottom surface 122 of the intermediate 12 contacts the top surface 371of the core portion 37, the first upper circuit layer 34 and the topsurface 421 of the filling material 42.

FIG. 6 illustrates a cross-sectional view of a wiring structure 1 daccording to some embodiments of the present disclosure. The wiringstructure 1 d is similar to the wiring structure 1 c shown in FIG. 5,except that a plurality of lower through vias 15 are further included.The lower through vias 15 extend through the first lower dielectriclayer 30 a and the two second lower dielectric layers 36 a of the lowerconductive structure 3, and contact respective ones of the bottomelectrical contacts 405 of the electronic devices 40. That is, each ofthe lower through vias 15 terminates at or on each of the bottomelectrical contacts 405 of the electronic devices 40.

FIG. 7 illustrates a cross-sectional view of a wiring structure 1 eaccording to some embodiments of the present disclosure. The wiringstructure 1 e is similar to the wiring structure 1 b shown in FIG. 4,except for a structure of a lower conductive structure 3 e. In the lowerconductive structure 3 e, the first lower dielectric layer 30 a (FIG. 4)is thinned to become a first lower dielectric layer 30 a′. Further, acircuit structure 3′ including the two second lower dielectric layers 36a and the three second lower circuit layers 38 a, 38 a′ is attached tothe first lower dielectric layer 30 a′ through an intervening layer 12 a(e.g., an adhesion layer). As shown in FIG. 7, a lateral peripheralsurface of the circuit structure 3′ is not coplanar with (e.g., isinwardly recessed from or otherwise displaced from) a lateral peripheralsurface of the core portion 37. In addition, a plurality of lowerthrough vias 15 are further included. The lower through vias 15 extendthrough the first lower dielectric layer 30 a′, the intervening layer 12a and the circuit structure 3′, and contact respective ones of thebottom electrical contacts 405 of the electronic devices 40. That is,each of the lower through vias 15 terminates at or on each of the bottomelectrical contacts 405 of the electronic devices 40. As shown in FIG.7, the through vias 16 e extend through the upper conductive structure 2a and the lower conductive structure 3 e.

FIG. 8 illustrates a cross-sectional view of a wiring structure 1 faccording to some embodiments of the present disclosure. The wiringstructure 1 f is similar to the wiring structure 1 e shown in FIG. 7,except for a structure of a lower conductive structure 3 f. In the lowerconductive structure 3 f, the first upper dielectric layer 30′ and thefirst lower dielectric layer 30 a′ are omitted. As shown in FIG. 8, thebottom surface 122 of the intermediate 12 contacts the top surface 371of the core portion 37, the first upper circuit layer 34 and the topsurface 421 of the filling material 42. Further, the top surface of theintervening layer 12 a contacts the bottom surface 372 of the coreportion 37, the first lower circuit layer 34 a, the bottom surface 422of the filling material 42 and the bottom surfaces 402 of the electronicdevices 40.

FIG. 9 illustrates a cross-sectional view of a wiring structure 1 gaccording to some embodiments of the present disclosure. The wiringstructure 1 g is similar to the wiring structure 1 shown in FIG. 1,except for a structure of a lower conductive structure 3 g. In the lowerconductive structure 3 g, an encapsulant 46 (e.g., a molding compound)is further included to encapsulate the electronic devices 40 to form amodule 4. Thus, the lower conductive structure 3 g includes the module4, and the module 4 includes a plurality of known good electronicdevices 40 and the encapsulant 46 encapsulating the known goodelectronic devices 40. As shown in FIG. 9, the encapsulant 46 does notcompletely cover the electrical contact (e.g., the top electricalcontacts 404 and the bottom electrical contacts 405). Thus, theelectrical contact (e.g., the top electrical contacts 404 and the bottomelectrical contacts 405) may be exposed from the encapsulant 46. A topsurface of the encapsulant 46 may be substantially coplanar with thebottom surfaces 402 of the electronic devices 40, and a bottom surfaceof the encapsulant 46 may be substantially coplanar with the bottomsurfaces 402 of the electronic devices 40.

The module 4 is disposed in the cavity 375 of the core portion 37. Themodule 4 has a lateral surface 45. The filling material 42 is disposedbetween the lateral surface 45 of the module 4 and the sidewall 3751 ofthe cavity 375 of the core portion 37. A portion of the filling material42 may extend to the top surface of the module 4. That is, the topsurface 421 of the filling material 42 may be higher than the topsurface of the module 4. However, the filling material 42 does notcompletely cover the electrical contact (e.g., the top electricalcontacts 404 and the bottom electrical contacts 405). Thus, theelectrical contact (e.g., the top electrical contacts 404 and the bottomelectrical contacts 405) may be exposed from the filling material 42. Asshown in FIG. 9, the bottom surface 422 of the filling material 42 maybe substantially coplanar with the bottom surface of the module 4. Insome embodiments, a material of the encapsulant 46 may be same as ordifferent from a material of the filling material 42.

FIG. 10 illustrates an enlarged view of an area “B” shown in FIG. 9. Athickness of the module 4 is defined as “T₂”, and a gap between thelateral surface 45 of the module 4 and the sidewall 3751 of the cavity375 of the core portion 37 is defined as “g₃”. A ratio of the thicknessT₂ to the gap g₃ is greater than 10:1, greater than 100:1, greater than250:1, or greater than 500:1. In some embodiments, the thickness of themodule 4 (e.g., the “T₂”) may be about 500 μm, and the gap between thelateral surface 45 of the module 4 and the sidewall 3751 of the cavity375 of the core portion 37 (e.g., the “g₃”) may be less than 2 μm, orless than 1 μm.

FIG. 11 illustrates a cross-sectional view of a wiring structure 1 haccording to some embodiments of the present disclosure. The wiringstructure 1 h is similar to the wiring structure 1 c shown in FIG. 5,except for a structure of a lower conductive structure 3 h. In the lowerconductive structure 3 h, an encapsulant 46 (e.g., a molding compound)is further included to encapsulate the electronic devices 40 to form amodule 4. Thus, the lower conductive structure 3 h includes the module4, and the module 4 includes a plurality of known good electronicdevices 40 and the encapsulant 46 encapsulating the known goodelectronic devices 40. The module 4 of FIG. 11 may be substantially sameas the module 4 of FIG. 9.

FIG. 12 illustrates a cross-sectional view of a wiring structure 1 jaccording to some embodiments of the present disclosure. The wiringstructure 1 j is similar to the wiring structure 1 f shown in FIG. 8,except for a structure of a lower conductive structure 3 j. In the lowerconductive structure 3 j, an encapsulant 46 (e.g., a molding compound)is further included to encapsulate the electronic devices 40 to form amodule 4. Thus, the lower conductive structure 3 j includes the module4, and the module 4 includes a plurality of known good electronicdevices 40 and the encapsulant 46 encapsulating the known goodelectronic devices 40. The module 4 of FIG. 12 may be substantially sameas the module 4 of FIG. 9.

FIG. 13 through FIG. 50 illustrate a method for manufacturing a wiringstructure according to some embodiments of the present disclosure. Insome embodiments, the method is for manufacturing the wiring structure 1shown in FIG. 1.

Referring to FIG. 13 through FIG. 34, a lower conductive structure 3 isprovided. The lower conductive structure 3 is manufactured as follows.Referring to FIG. 13, a first core material layer 37 a with a top copperfoil 50 and a bottom copper foil 52 is provided. 376

Referring to FIG. 13, a first core material layer 37 a with two innercircuit layers 376 is provided.

Referring to FIG. 14, a second core material layer 37 b and a third corematerial layer 37 c are disposed on the top surface and bottom surfaceof the first core material layer 37 a to cover the inner circuit layers376, so as to form a core portion 37. The core portion 37 may be in awafer type, a panel type or a strip type. The core portion 37 has a topsurface 371 and a bottom surface 372 opposite to the top surface 371.

Referring to FIG. 15, a top copper foil 50 is disposed on the topsurface 371 of the core portion 37, and a bottom copper foil 52 isdisposed on the bottom surface 372 of the core portion 37.

Referring to FIG. 16, a plurality of through holes 373 are formed toextend through the core portion 37, the top copper foil 50 and thebottom copper foil 52 by a drilling technique (such as laser drilling ormechanical drilling) or other suitable techniques.

Referring to FIG. 17, a second metallic layer 54 is formed or disposedon the top copper foil 50, the bottom copper foil 52 and side walls ofthe first through holes 373 by a plating technique or other suitabletechniques. A portion of the second metallic layer 54 on the side wallof each first through hole 373 defines a central through hole.

Referring to FIG. 18, an insulation material 392 is disposed to fill thecentral through hole defined by the second metallic layer 54.

Referring to FIG. 19, a top third metallic layer 56 and a bottom thirdmetallic layer 56 a are formed or disposed on the second metallic layer54 by a plating technique or other suitable techniques. The thirdmetallic layers 56, 56 a cover the insulation material 392.

Referring to FIG. 20, a top photoresist layer 57 is formed or disposedon the top third metallic layer 56, and a bottom photoresist layer 57 ais formed or disposed on the bottom third metallic layer 56 a. Then, thephotoresist layers 57, 57 a are patterned by exposure and development.

Referring to FIG. 21, portions of the top copper foil 50, the secondmetallic layer 54 and the top third metallic layer 56 that are notcovered by the top photoresist layer 57 are removed by an etchingtechnique or other suitable techniques. Portions of the top copper foil50, the second metallic layer 54 and the top third metallic layer 56that are covered by the top photoresist layer 57 remain to form a firstupper circuit layer 34. Meanwhile, portions of the bottom copper foil52, the second metallic layer 54 and the bottom third metallic layer 56a that are not covered by the bottom photoresist layer 57 a are removedby an etching technique or other suitable techniques. Portions of thebottom copper foil 52, the second metallic layer 54 and the bottom thirdmetallic layer 56 a that are covered by the bottom photoresist layer 57a remain to form a first lower circuit layer 34 a. Meanwhile, portionsof the second metallic layer 54 and the insulation material 392 that aredisposed in the through hole 373 form an interconnection via 39. Theinterconnection via 39 includes a base metallic layer 391 formed fromthe second metallic layer 54 and the insulation material 392. In someembodiments, the interconnection via 39 may include a bulk metallicmaterial that fills the through hole 373. The interconnection via 39electrically connects the first upper circuit layer 34 and the firstlower circuit layer 34 a.

Referring to FIG. 22, the top photoresist layer 57 and the bottomphotoresist layer 57 a are removed by a stripping technique or othersuitable techniques.

Referring to FIG. 23, a cavity 375 is formed to extend through the coreportion 37 by a drilling technique (such as laser drilling or mechanicaldrilling) or other suitable techniques.

Referring to FIG. 24, the core portion 37 is disposed on a tape 48(e.g., a die attach film, DAF). Meanwhile, the first lower circuit layer34 a may be embedded in the tape 48, and a sidewall 3751 of the cavity375 and the tape 48 define an accommodating space.

Referring to FIG. 25, a plurality of electronic devices 40 are disposedin the accommodating space defined by the cavity 375 and the tape 48.That is, the electronic devices 40 are disposed in the cavity 375 of thecore portion 37 and on the tape 48. In some embodiments, the electronicdevices 40 may be passive components, such as capacitors. The sizes andfunctions of the electronic devices 40 may be same as or different fromeach other. Each of the electronic devices 40 has a top surface 401, abottom surface 402 opposite to the top surface 401 and a lateral surface403 extending between the top surface 401 and the bottom surface 402.Each of the electronic devices 40 includes at least one electricalcontact (e.g., a plurality of top electrical contacts 404 disposedadjacent to the top surface 401, and a plurality of bottom electricalcontacts 405 disposed adjacent to the bottom surface 402). For example,each of the top electrical contacts 404 and the bottom electricalcontacts 405 may be an electrode. In some embodiments, the electronicdevices 40 may be disposed side by side, and the number of theelectronic devices 40 may be greater than ten, greater than twenty,greater than forty, or greater than sixty. In some embodiments, theelectronic devices 40 are known good electronic devices 40 that arereconstituted or rearranged in the cavity 375 of the core portion 37. Asshown in FIG. 25, the bottom surfaces 402 of the electronic devices 40may be substantially coplanar with the bottom surface 372 of the coreportion 37, and the top surfaces 401 of the electronic devices 40 may besubstantially coplanar with the top surface 371 of the core portion 37.Meanwhile, the bottom electrical contacts 405 may be embedded in thetape 48.

Referring to FIG. 26, a filling material 42 is formed or disposedbetween the electronic devices 40 and a sidewall 3751 of the cavity 375of the core portion 37. As shown in FIG. 26, the filling material 42 isformed or disposed between the lateral surfaces 403 of adjacent twoelectronic devices 40, and between the lateral surface 403 theelectronic device 40 and the sidewall 3751 of the cavity 375 of the coreportion 37. The filling material 42 has a top surface 421 and a bottomsurface 422 opposite to the top surface 421. A portion of the fillingmaterial 42 may extend to the top surfaces 401 of the electronic devices40. That is, the top surface 421 of the filling material 42 may behigher than the top surfaces 401 of the electronic devices 40. However,the filling material 42 does not completely cover the electrical contact(e.g., the top electrical contacts 404 and the bottom electricalcontacts 405). Thus, the electrical contact (e.g., the top electricalcontacts 404 and the bottom electrical contacts 405) may be exposed fromthe filling material 42. As shown in FIG. 26, the bottom surface 422 ofthe filling material 42 may be substantially coplanar with the bottomsurfaces 402 of the electronic devices 40.

Referring to FIG. 27, the tape 48 is removed.

Referring to FIG. 28, a first upper dielectric layer 30 is formed ordisposed on the top surface 371 of the core portion 37 to cover the topsurface 371 of the core portion 37, the first upper circuit layer 34,the top surface 421 of the filling material 42 and the top electricalcontacts 404 of the electronic devices 40 by a lamination technique orother suitable techniques. Meanwhile, a first lower dielectric layer 30a is formed or disposed on the bottom surface 372 of the core portion 37to cover the bottom surface 372 of the core portion 37, the first lowercircuit layer 34 a, the bottom surface 422 of the filling material 42and the bottom electrical contacts 405 of the electronic devices 40 by alamination technique or other suitable techniques.

Referring to FIG. 29, at least one through hole 303 is formed to extendthrough the first upper dielectric layer 30 to expose a portion of thefirst upper circuit layer 34 and the top electrical contacts 404 of theelectronic devices 40 by a drilling technique or other suitabletechniques. Meanwhile, at least one through hole 303 a is formed toextend through the first lower dielectric layer 30 a to expose a portionof the first lower circuit layer 34 a and the bottom electrical contacts405 of the electronic devices 40 by a drilling technique or othersuitable techniques.

Referring to FIG. 30, a top metallic layer 58 is formed on the firstupper dielectric layer 30 and in the through hole 303 to form an upperinterconnection via 35 by a plating technique or other suitabletechniques. Meanwhile, a bottom metallic layer 60 is formed on the firstlower dielectric layer 30 a and in the through hole 303 a to form alower interconnection via 35 a by a plating technique or other suitabletechniques. As shown in FIG. 30, the upper interconnection via 35 tapersdownwardly, and the lower interconnection via 35 a tapers upwardly.

Referring to FIG. 31, a top photoresist layer 59 is formed or disposedon the top metallic layer 58, and a bottom photoresist layer 59 a isformed or disposed on the bottom metallic layer 60. Then, thephotoresist layers 59, 59 a are patterned by exposure and development.

Referring to FIG. 32, portions of the top metallic layer 58 that are notcovered by the top photoresist layer 59 are removed by an etchingtechnique or other suitable techniques. Portions of the top metalliclayer 58 that are covered by the top photoresist layer 59 remain to forma second upper circuit layer 38. Meanwhile, portions of the bottommetallic layer 60 that are not covered by the bottom photoresist layer59 a are removed by an etching technique or other suitable techniques.Portions of the bottom metallic layer 60 that are covered by the bottomphotoresist layer 59 a remain to form a second lower circuit layer 38 a.

Referring to FIG. 33, the top photoresist layer 59 and the bottomphotoresist layer 59 a are removed by a stripping technique or othersuitable techniques.

Referring to FIG. 34, a second lower dielectric layer 36 a is formed ordisposed on the bottom surface 302 a of the first lower dielectric layer30 a to cover the bottom surface 302 a of the first lower dielectriclayer 30 a and the second lower circuit layer 38 a by a laminationtechnique or other suitable techniques. Then, a second lower circuitlayer 38 a′ is formed on the second lower dielectric layer 36 a. Then, abottom second lower dielectric layer 36 a is formed on the second lowerdielectric layer 36 a, and a bottom second lower circuit layer 38 a′ isformed on the bottom second lower dielectric layer 36 a. Meanwhile, thelower conductive structure 3 is formed. Then, an electrical property(such as open circuit/short circuit) of the lower conductive structure 3is tested.

Referring to FIG. 35 through FIG. 43, an upper conductive structure 2 isprovided. The upper conductive structure 2 is manufactured as follows.Referring to FIG. 35, a carrier 65 is provided. The carrier 65 may be aglass carrier, and may be in a wafer type, a panel type or a strip type.Then, a release layer 66 is coated on a bottom surface of the carrier65. Then, a conductive layer 67 (e.g., a seed layer) is formed ordisposed on the release layer 66 by a physical vapor deposition (PVD)technique or other suitable techniques. Then, a top circuit layer 24′ isformed on the conductive layer 67.

Referring to FIG. 36, a second dielectric layer 26 is formed on theconductive layer 67 to cover the top circuit layer 24′ by a coatingtechnique or other suitable techniques.

Referring to FIG. 37, at least one through hole 264 is formed to extendthrough the second dielectric layer 26 to expose a portion of theconductive layer 67 by an exposure and development technique or othersuitable techniques.

Referring to FIG. 38, a seed layer 68 is formed on a bottom surface 262of the second dielectric layer 26 and in the through hole 264 by a PVDtechnique or other suitable techniques.

Referring to FIG. 39, a photoresist layer 69 is formed on the seed layer68. Then, the photoresist layer 69 is patterned to expose portions ofthe seed layer 68 by an exposure and development technique or othersuitable techniques. The photoresist layer 69 defines a plurality ofopenings 691. At least one opening 691 of the photoresist layer 69corresponds to, and is aligned with, the through hole 264 of the seconddielectric layer 26.

Referring to FIG. 40, a conductive material 70 (e.g., a metallicmaterial) is disposed in the openings 691 of the photoresist layer 69and on the seed layer 68 by a plating technique or other suitabletechniques.

Referring to FIG. 41, the photoresist layer 69 is removed by a strippingtechnique or other suitable techniques.

Referring to FIG. 42, portions of the seed layer 68 that are not coveredby the conductive material 70 are removed by an etching technique orother suitable techniques. Meanwhile, a first circuit layer 24 and atleast one inner via 25 are formed. The first circuit layer 24 may be afan-out circuit layer or an RDL, and an L/S of the circuit layer 24 maybe less than or equal to about 2 μm/about 2 μm, or less than or equal toabout 1.8 μm/about 1.8 μm. The inner via 25 tapers upwardly.

Referring to FIG. 43, a plurality of first dielectric layers 20 and aplurality of first circuit layers 24 are formed by repeating the stagesof FIG. 36 to FIG. 42. In some embodiments, each first circuit layer 24is embedded in the corresponding first dielectric layer 20, and a topsurface 241 of the circuit layer 24 may be substantially coplanar with atop surface 201 of the first dielectric layer 20. Meanwhile, the upperconductive structure 2 is formed. Then, an electrical property (such asopen circuit/short circuit) of the upper conductive structure 2 istested.

Referring to FIG. 44, an adhesive layer 12 is formed or applied on thetop surface 31 of the lower conductive structure 3. In some embodiments,a material of the adhesive layer 12 may include Ajinomoto build-up film(ABF).

Referring to FIG. 45, the upper conductive structure 2 is attached tothe lower conductive structure 3 through the adhesive layer 12. In someembodiments, the known good upper conductive structure 2 is attached tothe known good lower conductive structure 3. Then, the adhesive layer 12is cured to form an intermediate layer 12. The top surface 121 of theintermediate layer 12 contacts the bottom surface 22 of the upperconductive structure 2 (that is, the bottom surface 22 of the upperconductive structure 2 is attached to the top surface 121 of theintermediate layer 12), and the bottom surface 122 of the intermediatelayer 12 contacts the top surface 31 of the lower conductive structure3. Thus, the bottommost first circuit layer 24 of the upper conductivestructure 2 and the second upper circuit layer 38 of the lowerconductive structure 3 are embedded in the intermediate layer 12. Insome embodiments, a bonding force between two adjacent dielectric layers(e.g., two adjacent first dielectric layers 20) of the upper conductivestructure 2 is greater than a bonding force between a dielectric layer(e.g., the bottommost first dielectric layer 20) of the upper conductivestructure 2 and the intermediate layer 12. A surface roughness of aboundary between two adjacent dielectric layers (e.g., two adjacentfirst dielectric layers 20) of the upper conductive structure 2 isgreater than a surface roughness of a boundary between a dielectriclayer (e.g., the bottommost first dielectric layer 20) of the upperconductive structure 2 and the intermediate layer 12.

Referring to FIG. 46, the carrier 65, the release layer 66 and theconductive layer 67 are removed so as to expose a portion of the innervia 25 and the top circuit layer 24′.

Referring to FIG. 47, at least one through hole 23 is formed to extendthrough at least a portion of the upper conductive structure 2 and theintermediate layer 12 by drilling (such as laser drilling) to exposes acircuit layer (e.g., second upper circuit layers 38) of the lowerconductive structure 3. The through hole 23 may include a through hole263 of the second dielectric layer 26, a plurality of through holes 203of the first dielectric layers 20 and a through hole 123 of theintermediate layer 12. In some embodiments, the through hole 23 extendsthrough the bottommost first circuit layer 24 of the upper conductivestructure 2 and terminates at or on a topmost circuit layer (e.g., thesecond upper circuit layer 38) of the lower conductive structure 3. Thatis, the through hole 23 does not extend through the topmost circuitlayer (e.g., the second upper circuit layer 38) of the lower conductivestructure 3. The through hole 23 may expose a portion of the topmostcircuit layer (e.g., the top surface of the second upper circuit layer38) of the lower conductive structure 3. As shown in FIG. 47, thethrough hole 23 tapers downwardly; that is, a size of a top portion ofthe through hole 23 is greater than a size of a bottom portion of thethrough hole 23. In addition, an inner surface 1231 of the through hole123 of the intermediate layer 12 is coplanar with or aligned with innersurfaces 2031 of the through holes 203 of the first dielectric layers 20and an inner surface 2631 of the through hole 263 of the seconddielectric layer 26.

Referring to FIG. 48, a metallic layer 72 is formed on the to surface 21of the upper conductive structure 2 and in the through hole 23 to format least one upper through via 14 in the through hole 23 by platingtechnique or other suitable technique(s).

Referring to FIG. 49, a top photoresist layer 73 is formed or disposedon the metallic layer 72. Then, the top photoresist layer 73 ispatterned by exposure and development technique or other suitabletechnique(s).

Referring to FIG. 50, the portions of the metallic layer 72 that are notcovered by the top photoresist layer 73 is removed by etching techniqueor other suitable technique(s). The portions of the metallic layer 72that are covered by the top photoresist layer 73 remain to form a secondcircuit layer 28. Then, the top photoresist layer 73 is removed bystripping technique or other suitable technique(s), so as to obtain thewiring structure 1 of FIG. 1.

FIG. 51 through FIG. 54 illustrate a method for manufacturing a wiringstructure according to some embodiments of the present disclosure. Insome embodiments, the method is for manufacturing the wiring structure 1a shown in FIG. 3. The initial stages of the illustrated process are thesame as, or similar to, the stages illustrated in FIG. 13 to FIG. 43.FIG. 51 depicts a stage subsequent to that depicted in FIG. 43.

Referring to FIG. 51, the upper conductive structure 2, the carrier 65,the release layer 66 and the conductive layer 67 are cut or singulatedconcurrently to form a plurality of strips 2′. Each of the strips 2′includes the upper conductive structure 2 a that is a strip structure.Then, the strips 2′ are tested. Alternatively, the upper conductivestructure 2 may be tested before the cutting process.

Referring to FIG. 52, the lower conductive structure 3 includes aplurality of strip areas 3′. Then, the strip areas 3′ are tested. Then,an adhesin layer 12 is formed or applied on the top surface 31 of thelower conductive structure 3. Then, the strips 2′ are attached to thestrip areas 3′ of the lower conductive structure 3 through theintermediate layer 12. The upper conductive structure 2 a faces and isattached to the lower conductive structure 3. In some embodiments, onlyknown good strip 2′ is selectively attached to known good strip area 3′of the lower conductive structure 3.

Referring to FIG. 53, the adhesive layer 12 is cured to form theintermediate layer 12. Then, the carrier 65, the release layer 66 andthe conductive layer 67 are removed.

Referring to FIG. 54, at least one through hole 23 is formed to extendthrough at least a portion of the upper conductive structure 2 and theintermediate layer 12 by drilling (such as laser drilling) to exposes acircuit layer (e.g., second upper circuit layers 38) of the lowerconductive structure 3. Then, the stages subsequent to that shown inFIG. 54 of the illustrated process are similar to the stages illustratedin FIG. 48 to FIG. 50. Then, the lower conductive structure 3 and theintermediate layer 12 are cut along the strip areas 3′, so as to obtainthe wiring structure 1 a of FIG. 3.

FIG. 55 through FIG. 58 illustrate a method for manufacturing a wiringstructure according to some embodiments of the present disclosure. Insome embodiments, the method is for manufacturing the wiring structure 1g shown in FIG. 9. The initial stages of the illustrated process are thesame as, or similar to, the stages illustrated in FIG. 13 to FIG. 24.FIG. 55 depicts a stage subsequent to that depicted in FIG. 24.

Referring to FIG. 55, a module 4 is provided. The module 4 includes aplurality of known good electronic devices 40 and an encapsulant 46encapsulating the known good electronic devices 40. The encapsulant 46does not completely cover the electrical contact (e.g., the topelectrical contacts 404 and the bottom electrical contacts 405). Thus,the electrical contact (e.g., the top electrical contacts 404 and thebottom electrical contacts 405) may be exposed from the encapsulant 46.A top surface of the encapsulant 46 may be substantially coplanar withthe bottom surfaces 402 of the electronic devices 40, and a bottomsurface of the encapsulant 46 may be substantially coplanar with thebottom surfaces 402 of the electronic devices 40. The module 4 has alateral surface 45. In some embodiments, the electronic devices 40 maybe disposed side by side, and the number of the electronic devices 40may be greater than ten, greater than twenty, greater than forty, orgreater than sixty.

Referring to FIG. 56, the module 4 is disposed in the accommodatingspace defined by the cavity 375 and the tape 48. That is, the module 4is disposed in the cavity 375 of the core portion 37 and on the tape 48.The bottom surface of the encapsulant 46 of the module 4 may besubstantially coplanar with the bottom surface 372 of the core portion37, and the top surface of the encapsulant 46 of the module 4 may besubstantially coplanar with the top surface 371 of the core portion 37.Meanwhile, the bottom electrical contacts 405 may be embedded in thetape 48.

Referring to FIG. 57, a filling material 42 is formed or disposedbetween the lateral surface 45 of the module 4 and a sidewall 3751 ofthe cavity 375 of the core portion 37. In some embodiments, a portion ofthe filling material 42 may extend to the top surface of the encapsulant46 of the module 4.

Referring to FIG. 58, the tape 48 is removed. Then, the stagessubsequent to that shown in FIG. 58 of the illustrated process aresimilar to the stages illustrated in FIG. 28 to FIG. 50, so as to obtainthe wiring structure 1 g of FIG. 9.

Spatial descriptions, such as “above,” “below,” “up,” “left,” “right,”“down,” “top,” “bottom,” “vertical,” “horizontal,” “side,” “higher,”“lower,” “upper,” “over,” “under,” and so forth, are indicated withrespect to the orientation shown in the figures unless otherwisespecified. It should be understood that the spatial descriptions usedherein are for purposes of illustration only, and that practicalimplementations of the structures described herein can be spatiallyarranged in any orientation or manner, provided that the merits ofembodiments of this disclosure are not deviated from by such anarrangement.

As used herein, the terms “approximately,” “substantially,”“substantial” and “about” are used to describe and account for smallvariations. When used in conjunction with an event or circumstance, theterms can refer to instances in which the event or circumstance occursprecisely as well as instances in which the event or circumstance occursto a close approximation. For example, when used in conjunction with anumerical value, the terms can refer to a range of variation less thanor equal to ±10% of that numerical value, such as less than or equal to±5%, less than or equal to ±4%, less than or equal to ±3%, less than orequal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%,less than or equal to ±0.1%, or less than or equal to ±0.05%. Forexample, two numerical values can be deemed to be “substantially” thesame or equal if a difference between the values is less than or equalto ±10% of an average of the values, such as less than or equal to ±5%,less than or equal to ±4%, less than or equal to ±3%, less than or equalto ±2%, less than or equal to ±1%, less than or equal to ±0.5%, lessthan or equal to ±0.1%, or less than or equal to ±0.05%.

Two surfaces can be deemed to be coplanar or substantially coplanar if adisplacement between the two surfaces is no greater than 5 μm, nogreater than 2 μm, no greater than 1 μm, or no greater than 0.5 μm.

As used herein, the singular terms “a,” “an,” and “the” may includeplural referents unless the context clearly dictates otherwise.

As used herein, the terms “conductive,” “electrically conductive” and“electrical conductivity” refer to an ability to transport an electriccurrent. Electrically conductive materials typically indicate thosematerials that exhibit little or no opposition to the flow of anelectric current. One measure of electrical conductivity is Siemens permeter (S/m). Typically, an electrically conductive material is onehaving a conductivity greater than approximately 10⁴ S/m, such as atleast 10⁵ S/m or at least 10⁶ S/m. The electrical conductivity of amaterial can sometimes vary with temperature. Unless otherwisespecified, the electrical conductivity of a material is measured at roomtemperature.

Additionally, amounts, ratios, and other numerical values are sometimespresented herein in a range format. It is to be understood that suchrange format is used for convenience and brevity and should beunderstood flexibly to include numerical values explicitly specified aslimits of a range, but also to include all individual numerical valuesor sub-ranges encompassed within that range as if each numerical valueand sub-range is explicitly specified.

While the present disclosure has been described and illustrated withreference to specific embodiments thereof, these descriptions andillustrations are not limiting. It should be understood by those skilledin the art that various changes may be made and equivalents may besubstituted without departing from the true spirit and scope of thepresent disclosure as defined by the appended claims. The illustrationsmay not be necessarily drawn to scale. There may be distinctions betweenthe artistic renditions in the present disclosure and the actualapparatus due to manufacturing processes and tolerances. There may beother embodiments of the present disclosure which are not specificallyillustrated. The specification and drawings are to be regarded asillustrative rather than restrictive. Modifications may be made to adapta particular situation, material, composition of matter, method, orprocess to the objective, spirit and scope of the present disclosure.All such modifications are intended to be within the scope of the claimsappended hereto. While the methods disclosed herein have been describedwith reference to particular operations performed in a particular order,it will be understood that these operations may be combined,sub-divided, or re-ordered to form an equivalent method withoutdeparting from the teachings of the present disclosure. Accordingly,unless specifically indicated herein, the order and grouping of theoperations are not limitations of the present disclosure.

What is claimed is:
 1. A wiring structure, comprising: a lowerconductive structure including: a core portion defining a cavity; and atleast one electronic device disposed in the cavity of the core portion;and an upper conductive structure disposed on the lower conductivestructure, wherein a line width of a circuit layer of the lowerconductive structure is greater than a line width of a circuit layer ofthe upper conductive structure.
 2. The wiring structure of claim 1,wherein a line space of the circuit layer of the lower conductivestructure is greater than a line space of the circuit layer of the upperconductive structure.
 3. The wiring structure of claim 1, wherein a linedensity of the circuit layer of the lower conductive structure isgreater than a line density of the circuit layer of the upper conductivestructure.
 4. The wiring structure of claim 1, wherein the cavityextends through the core portion, and the wiring structure furthercomprises a filling material filling the cavity.
 5. The wiring structureof claim 4, wherein the filling material is in contact with a topsurface of the at least one electronic device.
 6. The wiring structureof claim 1, wherein the lower conductive structure further includes acircuit structure disposed on the core portion.
 7. The wiring structureof claim 6, wherein the circuit structure is in contact with a fillingmaterial disposed between a lateral surface of the at least oneelectronic device and an inner sidewall of the cavity of the coreportion.
 8. The wiring structure of claim 6, wherein the circuitstructure includes a top dielectric layer in contact with the upperconductive structure and a top circuit layer embedded in the topdielectric layer adjacent to a top surface of the top dielectric layer.9. The wiring structure of claim 8, wherein a top surface of the circuitstructure is substantially coplanar with a top surface of the topcircuit layer.
 10. A wiring structure, comprising: a low-densityconductive structure including a core portion and a module, wherein themodule is disposed in a cavity of the core portion, and the moduleincludes at least one electronic device encapsulated in an encapsulantthereof; and a high-density conductive structure disposed on thelow-density conductive structure.
 11. The wiring structure of claim 10,further comprising a filling material in contact with the encapsulant ofthe module.
 12. The wiring structure of claim 11, wherein the fillingmaterial is in contact with a top surface of the module.
 13. The wiringstructure of claim 11, wherein a material of the encapsulant of themodule is different from a material of the filling material.
 14. Thewiring structure of claim 11, wherein a material of the encapsulant ofthe module is same as a material of the filling material.
 15. The wiringstructure of claim 10, wherein the low-density conductive structurefurther includes a circuit structure disposed on the core portion andcovering the module.
 16. The wiring structure of claim 15, wherein thecircuit structure is in contact with a filling material disposed betweena lateral surface of the module and an inner sidewall of the cavity ofthe core portion.
 17. The wiring structure of claim 15, wherein theupper circuit portion includes a top dielectric layer in contact withthe high-density conductive structure and a top circuit layer embeddedin the top dielectric layer adjacent to a top surface of the topdielectric layer.
 18. The wiring structure of claim 17, wherein a topsurface of the circuit structure is substantially coplanar with a topsurface of the top circuit layer.
 19. The wiring structure of claim 10,wherein the low-density conductive structure further includes aplurality of interconnection vias disposed around the module.
 20. Thewiring structure of claim 19, wherein the interconnection via includes abase metallic layer disposed on a side wall of a through hole of thecore portion.